HomeNewsIndia NewsPiezoMEMS: High-speed switching for ultrafast EM switches and sensors

    PiezoMEMS: High-speed switching for ultrafast EM switches and sensors

    Unlike the slow ferroelastic domain switching expected for ceramics, high-speed sub-microsecond ferroelastic domain switching and simultaneous lattice deformation are directly observed for the Pb(Zr0.4Ti0.6)O3 thin films. This exciting finding paves the way for high-frequency ultrafast electromechanical switches and sensors.

    Piezo micro electro mechanical systems (piezoMEMS) are miniaturized devices exhibiting piezoelectricity, i.e., the appearance of an electric charge under applied mechanical stress. These devices have many diverse applications in energy harvesters, micropumps, sensors, inkjet printer heads, switches, and so on. In permanently polarized (ferroelectric) materials, ferroelastic domain switching affects the piezoelectric properties significantly, and this behavior can be exploited for piezoMEMS applications.

    Pb(Zr1-xTix)O3 (PZT) thin films have excellent piezoelectric and ferroelectric properties; therefore, they are potential candidates for MEMS applications. Under an applied electric field, both lattice elongation and 90° ferroelastic domain switching are observed in tetragonal PZT thin films. In particular, non-180° ferroelastic domain switching has important implications for the future realization of high-performance piezoMEMS devices.

    However, before the recent investigation, the speed of this 90° domain switching was unknown. In addition, the relationship between the speeds of the lattice deformation and ferroelastic domain switching had not been determined. To investigate these speeds, the research team led by Hiroshi Funakubo examined the switching behavior of Pb(Zr0.4Ti0.6)O3 thin films under applied rectangular electric field pulses.

    To observe the changes in the lattice and the domain structure, time-resolved in situ synchrotron X-ray diffraction was carried out in synchronization with a high-speed pulse generator. These observations were performed at the BL13XU beamline at the SPring-8 synchrotron radiation facility. The electric field pulses were applied to the PZT thin films through Pt top electrodes, which were fabricated on top of the films.

    Investigation of the diffraction peaks in the PZT thin films revealed elongation of the surface normal c-axis lattice parameter of the c-domain with a simultaneous decrease in the surface normal a-axis lattice parameter of the a-domain under the applied electric field. The intensities of the diffraction peaks also changed under the electric field. These observations provided direct evidence of 90° domain switching.

    To determine the switching speed, the lattice elongation and domain switching behaviors were plotted as functions of time. These plots revealed that these processes were completed within 40 ns and occurred simultaneously in response to the applied electric field. The switching behavior was also shown to be perfectly repeatable.

    The high-speed switching observed in these experiments was limited by the present electrical equipment, but is faster than that reported in previous studies. Further, this high-speed 90° switching is reversible and can be used to enhance the piezoelectric response in piezoMEMS devices by several tens of nanoseconds. Therefore, this finding is of considerable importance for the ongoing development of ultrafast electromechanical switches and sensors.

    Source:EurekAlert

    ELE Times Bureau
    ELE Times Bureauhttps://www.eletimes.ai/
    ELE Times provides a comprehensive global coverage of Electronics, Technology and the Market. In addition to providing in depth articles, ELE Times attracts the industry’s largest, qualified and highly engaged audiences, who appreciate our timely, relevant content and popular formats. ELE Times helps you build awareness, drive traffic, communicate your offerings to right audience, generate leads and sell your products better.

    Related News

    Must Read

    What is Fashion Tech? Providing New Product Value and Customer Experiences with Technology

    Courtesy: Murata Electronics What is fashion tech? - diverse technologies...

    Emergency Screaming Detection: How AI Recognizes Human Screams and Saves Lives

    Courtesy: Renesas Detecting human screams for help is important in...

    India’s Electronics Push: Ambition Is Clear. Execution Will Decide the Outcome

    India’s electronics story has entered a decisive phase. The...

    India on the Road to Semicon Self-Reliance with Three More Plants

    India to welcome three more semiconductor plants after PM...

    Upcoming years to Bring Boom for Semiconductors and Electronics

    Union Minister for Electronics and Information Technology Ashwini Vaishnaw...

    R&S Propels 6G Readiness With FR1–FR3 Carrier Demonstration

    Rohde & Schwarz and Qualcomm Technologies, Inc. have reached...

    ROHM and Suchi Semicon Establish a Strategic Semicon Manufacturing Partnership in India

    ROHM and Suchi Semicon have announced the establishment of...

    Keysight to Demonstrate NR-NTN devices Mobility Testing at MWC 2026 in Collaboration with Samsung

    Keysight Technologies, Inc. will demonstrate lab-based validation of new...

    ROHM Strengthens Supply Capability for GaN Power Devices

    Combining TSMC’s Process Technology to Build an End-to-End, In-Group...